Methods and apparatus for preventing plasma un-confinement...

Details Methods and apparatus for preventing plasma un-confinement... Methods and apparatus for preventing plasma un-confinement...

2006-09-29

2010-06-22

Kackar, Ram N (Department: 1792)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

Having glow discharge electrode gas energizing means

C156S345100, C118S624000, C118S728000

Reexamination Certificate

active

07740736

ABSTRACT:
Techniques and apparatus for substantially reducing and/or preventing the occurrence of plasma un-confinement events, including one or more of shielding a gap disposed between chamber components and along a RF current path with a dielectric shielding structure, shielding a sharp component structure with a dielectric shielding structure, and keeping the gap between adjacent pairs of plasma confinement rings smaller than the worst-case DeBye length for the plasma.

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