Method for operating a sputter cathode with a target

Details Method for operating a sputter cathode with a target Method for operating a sputter cathode with a target

2005-06-29

2009-08-18

Nguyen, Nam X (Department: 1795)

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

C204S298120, C204S298210, C204S298220, C204S298260, C204S298270

Reexamination Certificate

active

07575662

ABSTRACT:
The invention relates to a method for operating a magnetron sputter cathode, in particular a tube cathode or several tube cathodes forming an array. In such cathodes a target passes through a magnetic field, whereby induction currents flow in the target which distort the magnetic field. This results in the nonuniform coating of a substrate. By having the relative movement between magnetic field and target alternately reverse its direction, the effect of the magnetic field distortion can be compensated. This yields greater uniformity of the coating on a substrate to be coated.

REFERENCES:
patent: 5215638 (1993-06-01), Hausler
patent: 6303008 (2001-10-01), Pichulo et al.
patent: 6365010 (2002-04-01), Hollars
patent: 6793785 (2004-09-01), Teng et al.
patent: 2004/0231973 (2004-11-01), Sato et al.
patent: 41 17 368 (1992-12-01), None
patent: 41 26 236 (1993-02-01), None
patent: 703599 (1996-03-01), None
patent: 0703599 (1997-12-01), None
patent: 11029866 (1999-02-01), None
patent: 2004019006 (2004-01-01), None
patent: WO-82/02725 (1982-08-01), None
Machine Translation of Description section, EP 703599 A1, Dresse. Mar. 1996.
Wright, et al., “Design advances and applications of the rotatable cylindrical magnetron”, Journal of Vacuum Science and Technology: Part A., Amer. Instit. Of Physics. New York, (1986).

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