4. Pumps
  5. With intercooler

Wolfgang Buschbeck

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Apparatus for the rapid evacuation of a vacuum chamber

Pumps – With intercooler
Patent

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Linear thermal evaporator for vacuum vapor depositing apparatus

Electric resistance heating devices – Heating devices – Vaporizer
Patent

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Method for operating a sputter cathode with a target

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Method for the evacuation of a low-vacuum chamber and of a HGH-v

Pumps – Processes
Patent

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Sputtering device with a cathode with permanent magnet system

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-728753

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