Semiconductor device with analog capacitor and method of...

Details Semiconductor device with analog capacitor and method of... Semiconductor device with analog capacitor and method of...

2005-03-09

2008-12-09

Sarkar, Asok K (Department: 2891)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C257SE21648, C438S393000, C438S957000

Reexamination Certificate

active

07462535

ABSTRACT:
A semiconductor device having an analog capacitor and a method of fabricating the same are disclosed. The semiconductor device includes a bottom plate electrode disposed at a predetermined region of a semiconductor substrate, and an upper plate electrode having a region overlapped with the bottom plate electrode thereon. The upper plate electrode and the bottom plate electrode are formed of a metal compound. A capacitor dielectric layer is interposed between the bottom plate electrode and the upper plate electrode. A bottom electrode plug and an upper electrode plug are connected to the bottom plate electrode and the upper plate electrode through the interlayer dielectric layer.

REFERENCES:
patent: 6025226 (2000-02-01), Gambino et al.
patent: 6081021 (2000-06-01), Gambino et al.
patent: 6180976 (2001-01-01), Roy
patent: 6261917 (2001-07-01), Quek et al.
patent: 6291307 (2001-09-01), Chu et al.
patent: 6342734 (2002-01-01), Allman et al.
patent: 6458648 (2002-10-01), Molloy et al.
patent: 6483142 (2002-11-01), Hsue et al.
patent: 2001/0026003 (2001-10-01), Yoshitomi et al.
patent: 0 881 683 (1998-12-01), None
patent: 2001-203329 (2001-07-01), None
patent: 02-30421 (2002-04-01), None
Quirk, M. et al., Semiconductor Manufacturing Technology, 2001, Prentice Hall, p. 307.

Affiliated with

Also associated with

Rating

Semiconductor device with analog capacitor and method of... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor device with analog capacitor and method of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device with analog capacitor and method of... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4040685