Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-01-24
2008-05-20
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C359S859000
Reexamination Certificate
active
07375798
ABSTRACT:
There is provided an EUV optical projection system. The system includes a first mirror, a second mirror, a third mirror, a fourth mirror, a fifth mirror, and a sixth mirror situated in an optical path from an object plane to an image plane, for imaging an object in said object plane into an image in said image plane. The image has a width W and a secant length SL, and the width W is greater than about 2 mm.
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Dinger Udo
Hudyma Russell
Mann Hans-Jürgen
Carl Zeiss SMT AG
Nguyen Henry Hung
Ohlandt Greeley Ruggiero & Perle L.L.P.
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