Semiconductor device with metal gate and high-k tantalum...

Details Semiconductor device with metal gate and high-k tantalum... Semiconductor device with metal gate and high-k tantalum...

2006-06-13

2006-06-13

Chaudhari, Chandra (Department: 2891)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S785000

Reexamination Certificate

active

07060571

ABSTRACT:
Microminiaturized semiconductor devices are fabricated with a replacement metal gate and a high-k tantalum oxide or tantalum oxynitride gate dielectric with significantly reduced carbon. Embodiments include forming an opening in a dielectric layer by removing a removable gate, depositing a thin tantalum film, as by PVD at a thickness of 25 Å to 60 Å lining the opening, and then conducting thermal oxidation, as at a temperature of 100° C. to 500° C., in flowing oxygen or ozone to form a high-k tantalum oxide gate dielectric layer, or in oxygen and N2O or ozone and N2O ammonia to form a high-k tantalum oxynitride gate dielectric. Alternatively, oxidation can be conducted in an oxygen or ozone plasma to form the high-k tantalum oxide layer, or in a plasma containing N2O and oxygen or ozone to form the high-k tantalum oxynitride gate dielectric layer.

REFERENCES:
patent: 6020024 (2000-02-01), Maiti et al.
patent: 6225168 (2001-05-01), Gardner et al.
patent: 6372659 (2002-04-01), Yu
patent: 6476454 (2002-11-01), Suguro

Affiliated with

Also associated with

Rating

Semiconductor device with metal gate and high-k tantalum... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor device with metal gate and high-k tantalum..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device with metal gate and high-k tantalum... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3703476