Process of forming a micro-pattern of a metal or a metal oxide

Details Process of forming a micro-pattern of a metal or a metal oxide Process of forming a micro-pattern of a metal or a metal oxide

2006-04-25

2006-04-25

McPherson, John A. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

C430S270100, C430S330000

Reexamination Certificate

active

07033738

ABSTRACT:
A rapid and efficient process of forming a metal-containing pattern by producing, through photoreaction, a difference in solubility between exposed and unexposed areas of a thing film, and developing the film to produce a patterned film, followed by oxidation or reduction to provide a pure metal or metal oxide pattern.

REFERENCES:
patent: 5064685 (1991-11-01), Kestenbaum et al.
patent: 5534312 (1996-07-01), Hill et al.
patent: 2003/0124457 (2003-07-01), Jung et al.
patent: 2003/0207568 (2003-11-01), Byun et al.
patent: 62-263973 (1987-11-01), None

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