Monitoring a thermal processing system

Details Monitoring a thermal processing system Monitoring a thermal processing system

2008-07-29

2008-07-29

Ton, David (Department: 2117)

Error detection/correction and fault detection/recovery

Pulse or data error handling

Digital logic testing

C702S130000

Reexamination Certificate

active

07406644

ABSTRACT:
A method of monitoring a thermal processing system in real-time using a built-in self test (BIST) table to detect, diagnose and/or predict fault conditions and/or degraded performance. The method includes positioning a plurality of wafers in a processing chamber in the thermal processing system, performing a self test process, determining a real-time transient error from a measured transient response and a baseline transient response determined by a BIST rule stored in the BIST table, and comparing the transient error to operational limits and warning limits established by the BIST rule for the self test process.

REFERENCES:
patent: 5443315 (1995-08-01), Lee et al.
patent: 5970313 (1999-10-01), Rowland et al.
patent: 6195621 (2001-02-01), Bottomfield
patent: 6351723 (2002-02-01), Maekawa
patent: 6803548 (2004-10-01), Wang et al.

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