Coating apparatus – Gas or vapor deposition
Reexamination Certificate
2011-05-17
2011-05-17
Robinson, Daniel (Department: 3742)
Coating apparatus
Gas or vapor deposition
Reexamination Certificate
active
07942969
ABSTRACT:
A substrate cleaning chamber comprises various components, such as for example, a consumable ceramic liner, substrate heating pedestal, and process kit. The consumable ceramic liner is provided for connecting a gas outlet channel of a remote gas energizer to a gas inlet channel of a substrate cleaning chamber. The substrate heating pedestal comprises an annular plate having a substrate receiving surface with a plurality of ceramic balls positioned in an array of recesses. A process kit comprises a top plate, top liner, gas distributor plate, bottom liner, and focus ring.
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patent: 6183614 (2
Riker Martin
Wang Wei W.
Applied Materials Inc.
Janah & Associates P.C.
Robinson Daniel
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