4. Coating apparatus
  5. Gas or vapor deposition

Wei W. Wang

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Apparatus and a method for cleaning a dielectric film

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Cleaning of native oxide with hydrogen-containing radicals

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With plasma generation means remote from processing chamber
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Detachable electrostatic chuck for supporting a substrate in...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method for front end of line fabrication

Etching a substrate: processes – Gas phase etching of substrate
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Method for front end of line fabrication

Etching a substrate: processes – Gas phase etching of substrate
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Profile ID: LFUS-PAI-P-2175285

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