Method of manufacturing a nonvolatile memory device having a pro

Details Method of manufacturing a nonvolatile memory device having a pro Method of manufacturing a nonvolatile memory device having a pro

1998-11-25

2000-07-25

Chaudhuri, Olik

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

438258, H01L 21336

Patent

active

060936053

ABSTRACT:
A nonvolatile memory device in which an electrically conductive "program assist plate" is formed over the nonvolatile memory cells. Appropriate voltages are applied to the program assist plate to greatly increase the cell coupling ratio, thereby reducing the program and erase voltages, and increasing the speed of operation. The manufacturing process is simple, and it results in a more planar structure which facilitates subsequent manufacturing processes.

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