4. Cleaning and liquid contact with solids
  5. Processes
  6. Including application of electrical radiant or wave energy...

Zhong Qiang Hua

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Gas delivery system for semiconductor processing

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate

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In situ deposition and integration of silicon nitride in a...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate

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Internal balanced coil for inductively coupled high density...

Semiconductor device manufacturing: process – Including control responsive to sensed condition
Reexamination Certificate

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Method for high aspect ratio HDP CVD gapfill

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method for high aspect ratio HDP CVD gapfill

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2307358

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