4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Zhi-Song Huang

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Device with gaps for capacitance reduction

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Device with self aligned gaps for capacitance reduction

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Fin structure formation

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3046557

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