4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Yutaka Ikku

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Charged particle beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate

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Composite charged particle beam apparatus, method of...

Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate

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Fluorescent X-ray analysis apparatus

X-ray or gamma ray systems or devices – Specific application – Fluorescence
Reexamination Certificate

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Focused charged beam apparatus, and its processing and observati

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Focused ion beam apparatus

Radiant energy – Means to align or position an object relative to a source or...
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Profile ID: LFUS-PAI-P-569740

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