Composite charged particle beam apparatus, method of...

Details Composite charged particle beam apparatus, method of... Composite charged particle beam apparatus, method of...

2011-07-05

2011-07-05

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S492210, C250S311000

Reexamination Certificate

active

07973280

ABSTRACT:
An apparatus is provided that precisely conduct ion beam etching to a sample having the properties of which easily change by electron beam irradiation with no loss of ease of operation and throughput. An apparatus includes an ion beam lens barrel and an electron beam lens barrel, which can observe or measure the conditions of a sample with an electron beam in the process of etching with an ion beam, wherein first, an observation image is obtained that includes the entire process area formed by secondary signals generated by an electron beam, secondly, an irradiation permit area and an irradiation inhibit area are defined in the observation image, and thirdly, electron beam irradiation is restricted only to the irradiation permit area.

REFERENCES:
patent: 5656811 (1997-08-01), Itoh et al.
patent: 2003/0089852 (2003-05-01), Ochiai et al.
patent: 2004/0108458 (2004-06-01), Gerlach et al.
patent: 2008/0061233 (2008-03-01), Ogawa

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