Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

2006-08-24

2008-10-28

Nguyen, Kiet T (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S492210, C250S309000, C250S310000

Reexamination Certificate

active

07442942

ABSTRACT:
To include a focused ion beam apparatus fabricating a sliced specimen by processing a specimen as well as observing the sliced specimen, a scanning electron microscope observing the slice specimen, a gas-ion beam irradiation apparatus performing finishing processing by irradiating a gas-ion beam onto a surface of the sliced specimen, a specimen stage on which the sliced specimen is fixed and having at least one or more rotation axis, a specimen posture recognition means recognizing positional relation of the sliced specimen with respect to the specimen stage and a specimen stage control means controlling the specimen stage based on a specimen posture recognized by the posture recognition means and an installation angle of the gas-ion beam irradiation apparatus in order to allow an incident angle of the gas-ion beam with respect to the obverse or the reverse of the sliced specimen to be a desired value.

REFERENCES:
patent: 7268356 (2007-09-01), Shichi et al.
patent: 7381968 (2008-06-01), Tanaka et al.

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