4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Yuri Erokhin

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Active wafer cooling during damage engineering implant to...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Cleave initiation using varying ion implant dose

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Subsequent separation into plural bodies
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Internal gettering in SIMOX SOI silicon substrates

Semiconductor device manufacturing: process – Gettering of substrate – By implanting or irradiating
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Method of producing a high resistivity SIMOX silicon substrate

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Rutherford backscattering detection for use in Ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Profile ID: LFUS-PAI-P-2075974

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