4. Coating processes
  5. Measuring, testing, or indicating
  6. Thickness or uniformity of thickness determined

Yukio Morishige

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Exposure apparatus for drawing patterns on substrates

Photocopying – Projection printing and copying cameras – Step and repeat
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Focusing method

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate

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Laser correction method and apparatus

Coherent light generators – Particular active media – Gas
Reexamination Certificate

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Laser CVD device and laser CVD method

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Laser machining method and apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With means for photochemical energization of a gas using...
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Profile ID: LFUS-PAI-P-58143

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