Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With means for photochemical energization of a gas using...
Reexamination Certificate
2005-08-09
2005-08-09
Lund, Jeffrie R. (Department: 1763)
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With means for photochemical energization of a gas using...
C156S345290, C156S345330, C118S715000, C118S722000
Reexamination Certificate
active
06926801
ABSTRACT:
In a laser machining method for removing remaining defects on a photomask, there has been problems to be resolved that damage is formed at the portion of the substrate where the defect has been removed, thus resulting in degraded quality of machining. In a laser machining method for removing remaining defects on a photomask by a method of laser machining, the remaining defects are removed by using a configuration in which irradiation with a laser beam is performed from below with a to-be-machined surface directed downward, and irradiation with a laser beam in an atmosphere containing a halogenated hydrocarbon gas (as an example, ethyl iodide).
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Chinese Office Action issued Nov. 26, 2004.
Dickstein Shapiro Morin & Oshinsky LLP.
Laserfront Technologies, Inc.
Lund Jeffrie R.
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