4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Yukinori Ochiai

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Method and system for forming fine patterns using hologram

Optical: systems and elements – Holographic system or element – Using a hologram as an optical element
Patent

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Method for forming photoluminescence layer on a semiconductor la

Coating processes – Direct application of electrical – magnetic – wave – or... – Pretreatment of substrate or post-treatment of coated substrate
Patent

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Objective lens and charged particle beam system

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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SOI MOSFET

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Profile ID: LFUS-PAI-P-40891

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