Optical: systems and elements – Holographic system or element – Using a hologram as an optical element
Patent
1996-04-12
1998-11-17
Henry, Jon W.
Optical: systems and elements
Holographic system or element
Using a hologram as an optical element
359565, 359 1, 378 34, 378 35, G02B 532, G02B 2724, G03H 100
Patent
active
058384685
ABSTRACT:
The method for forming a fine pattern on a substrate disclosed includes a step of preparing a hologram having a pattern, a step of irradiating material waves (de Broglie waves) such as neutral beams, ion beams and electron beams on the hologram, and a step of imaging the pattern on the substrate with the material waves being interfered by passing through the hologram. The light source has a source that emits a beam having a coherent wave front. Since the fine patterns are formed by utilizing the interference of material waves, the minimum processing precision can be enhanced to the extent of the wavelength of the material wave.
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Fujita Jun-Ichi
Manako Shoko
Matsui Shinji
Ochiai Yukinori
Chang Audrey
Henry Jon W.
NEC Corporation
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