Coating processes
Coating by vapor, gas, or smoke
Base includes an inorganic compound containing silicon or...
Inventor
active
Apparatus for vaporizing and supplying a material
Chemical vapor deposition apparatus and chemical vapor...
Chemical vapor deposition apparatus and chemical vapor...
Cleaning process and cleaning agent for harmful gas
Material for forming insulation film and film-forming method...
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Profile ID: LFUS-PAI-P-807454