4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Yuichiro Fujikawa

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Apparatus for removing tramp materials and method therefor

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Film deposition processing device having transparent support and

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Film forming apparatus and method

Coating apparatus – Gas or vapor deposition
Patent

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Method and apparatus for manufacturing a zinc oxide thin...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Shower head and film forming apparatus using the same

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Profile ID: LFUS-PAI-P-565491

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