Apparatus for removing tramp materials and method therefor

Refrigeration – Low pressure cold trap process and apparatus

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417901, B01D 800

Patent

active

057042144

ABSTRACT:
A trap body is removably attached in the housing inserted in that portion of the exhaust passage which is situated on the upstream side of a vacuum pump, and has cooling fins for cooling the tramp materials in the exhaust gas brought into contact with the cooling means, thereby liquefying the tramp materials. Therefore, the tramp materials, such as unaffected process gases, products of reaction, etc., contained in the exhaust gas flowing through the exhaust passage, are cooled and liquefied when they are touched by the trap body cooled by the cooling unit, and adhere to the surface of the trap body. Thus, the tramp materials in the exhaust gas can be removed lest they damage the vacuum pump on the downstream side or close up the exhaust passage.

REFERENCES:
patent: 4479361 (1984-10-01), Osher
patent: 4551197 (1985-11-01), Guilmette et al.
patent: 5303558 (1994-04-01), Caton et al.

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