Refrigeration – Low pressure cold trap process and apparatus
Patent
1996-04-18
1998-01-06
Kilner, Christopher
Refrigeration
Low pressure cold trap process and apparatus
417901, B01D 800
Patent
active
057042144
ABSTRACT:
A trap body is removably attached in the housing inserted in that portion of the exhaust passage which is situated on the upstream side of a vacuum pump, and has cooling fins for cooling the tramp materials in the exhaust gas brought into contact with the cooling means, thereby liquefying the tramp materials. Therefore, the tramp materials, such as unaffected process gases, products of reaction, etc., contained in the exhaust gas flowing through the exhaust passage, are cooled and liquefied when they are touched by the trap body cooled by the cooling unit, and adhere to the surface of the trap body. Thus, the tramp materials in the exhaust gas can be removed lest they damage the vacuum pump on the downstream side or close up the exhaust passage.
REFERENCES:
patent: 4479361 (1984-10-01), Osher
patent: 4551197 (1985-11-01), Guilmette et al.
patent: 5303558 (1994-04-01), Caton et al.
Fujikawa Yuichiro
Hatano Tatsuo
Murakami Seishi
Kilner Christopher
Tokyo Electron Limited
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