Shower head and film forming apparatus using the same

Details Shower head and film forming apparatus using the same Shower head and film forming apparatus using the same

1996-04-18

1997-01-21

Bueker, Richard

Coating apparatus

Gas or vapor deposition

With treating means

118715, 118724, C23C 1600

Patent

active

055956068

ABSTRACT:
A shower head of a metal CVD apparatus has a raw gas passage and a reduction gas passage for independently and respectively supplying a raw gas and a reduction gas into a process chamber. The shower head includes upper, middle and lower blocks which are formed independently of each other. Each of the raw gas passage and the reduction gas passage is branched from the upper block to the lower block. A coolant passage is formed in the lower block near supply outlets of the raw gas and the reduction gas for cooling the supply outlets. A heater is arranged in the upper and middle blocks for heating the raw gas passage.

REFERENCES:
patent: 4209357 (1980-06-01), Gorin
patent: 4625678 (1986-12-01), Shioya
patent: 4951603 (1990-08-01), Yoshino
patent: 5252131 (1993-10-01), Kiyama

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