4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Etching inorganic substrate

Young-Suk Sim

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Microcontact printing method using imprinted nanostructure...

Etching a substrate: processes – Forming or treating an article whose final configuration has...
Reexamination Certificate

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Stamp for micro/nano imprint lithography using diamond-like...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
Reexamination Certificate

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UV nanoimprint lithography process using elementwise...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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