4. Radiation imagery chemistry: process, composition, or product th
  5. Radiation modifying product or process of making
  6. Radiation mask

Young-Sam Jeon

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Method of fabricating X-ray mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent

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X-ray absorber in X-ray mask and method for manufacturing the sa

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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X-ray mask and its fabrication method

X-ray or gamma ray systems or devices – Specific application – Lithography
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Profile ID: LFUS-PAI-P-428511

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