Method of fabricating X-ray mask

Details Method of fabricating X-ray mask Method of fabricating X-ray mask

1997-06-17

1998-10-20

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

378 35, G03F 900

Patent

active

058244409

ABSTRACT:
A method of fabricating an X-ray mask includes the steps of forming a membrane on a substrate, forming a first material on the membrane, implanting predetermined ions into the first material, planarizing the membrane by removing a part of the first material and membrane, forming an absorber on the membrane planarized and depositing a second material on the absorber, implanting predetermined ions into the second material, planarizing the absorber by removing a part of the second material and membrane, and patterning the absorber planarized to have a predetermined shape.

REFERENCES:
patent: 5413953 (1995-05-01), Chien et al.
patent: 5482802 (1996-01-01), Celler et al.

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