4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Youichi Deguchi

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Plasma process apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Vacuum processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Profile ID: LFUS-PAI-P-150117

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