4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Yoshiro Goto

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Back-scattered electron detector for use in an electron microsco

Radiant energy – Inspection of solids or liquids by charged particles
Patent

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Buried-channel MOS transistor and process of producing same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent

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Buried-channel MOS transistor and process of producing same

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent

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Exposure system and method using an electron beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Integrated circuit device with switching between active mode...

Miscellaneous active electrical nonlinear devices – circuits – and – Specific identifiable device – circuit – or system – With specific source of supply or bias voltage
Reexamination Certificate

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Profile ID: LFUS-PAI-P-120316

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