Back-scattered electron detector for use in an electron microsco

Details Back-scattered electron detector for use in an electron microsco Back-scattered electron detector for use in an electron microsco

1978-09-14

1979-12-04

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250310, 250397, G01N 2300

Patent

active

041773799

ABSTRACT:
A back-scattered electron detector for use in an electron microscope of an electron beam exposure system for detecting back-scattered electrons from a specimen includes a transparent plate employed as a light transmitting guide, and a part of the plate having a plastic scintillator coated thereon which emits light outputs in accordance with the back-scattered electrons. Gratings are provided at the scintillator part of the plate to reflect the emitted light outputs so as to be transmitted to a photo-electric convertor at the end of the plate. An aluminum layer is coated on the outside surface of the transparent plate for increasing light reflecting efficiency thereof.

REFERENCES:
patent: 2841715 (1958-07-01), Schultz
patent: 3047719 (1962-07-01), Mayer
patent: 3141105 (1964-07-01), Courtney-Pratt
patent: 3426174 (1969-02-01), Graham et al.
patent: 3539808 (1970-11-01), Hahn

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