4. Heating
  5. With work cooling structure

Yoshimasa Kawase

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Apparatus and method for evaluating semiconductor material

Optics: measuring and testing – For light transmission or absorption
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Ion implanter and method of manufacturing semiconductor device

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Method and apparatus for manufacturing a semiconductor device

Semiconductor device manufacturing: process – With measuring or testing
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Wafer heat-treatment system and wafer heat-treatment method

Heating – With work cooling structure
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