4. Adhesive bonding and miscellaneous chemical manufacture
  5. Delaminating processes adapted for specified product
  6. Delaminating in preparation for post processing recycling step

Yoshihiro Yanagi

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Dry etching method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Plasma processing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Plasma processing method and apparatus

Electric heating – Metal heating – By arc
Patent

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Plasma processing method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Profile ID: LFUS-PAI-P-552413

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