4. Stock material or miscellaneous articles
  5. All metal or with adjacent metals
  6. Composite; i.e., plural, adjacent, spatially distinct metal...

Yoshiharu Katoh

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High-purity metal and metal silicide target for LSI electrodes

Stock material or miscellaneous articles – All metal or with adjacent metals – Composite; i.e. – plural – adjacent – spatially distinct metal...
Patent

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Process for producing high-purity metal targets for LSI electrod

Specialized metallurgical processes – compositions for use therei – Processes – Electrothermic processes
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Profile ID: LFUS-PAI-P-1009486

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