4. Optics: measuring and testing
  5. By configuration comparison
  6. With comparison to master, desired shape, or reference voltage

Yoram Uziel

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Air bearing-sealed micro-processing chamber

Abrading – Abrading process – Utilizing fluent abradant
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Autofocusing apparatus and method for high resolution...

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
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Buffer station for wafer backside cleaning and inspection

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
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Contaminant removal by laser-accelerated fluid

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Iced film substrate cleaning

Electric heating – Metal heating – By arc
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Profile ID: LFUS-PAI-P-839639

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