Iced film substrate cleaning

Details Iced film substrate cleaning Iced film substrate cleaning

2005-03-08

2005-03-08

Elve, M. Alexandra (Department: 1725)

Electric heating

Metal heating

By arc

C219S121840, C219S121850

Reexamination Certificate

active

06864458

ABSTRACT:
Apparatus for cleaning a surface of a substrate includes a cooling device, which is adapted to cool a region of the substrate in a vicinity of a particle on the surface, so as to cause a fluid in contact with the surface to form a frozen film in the vicinity of the particle. A radiation source is adapted to direct a beam of energy toward the surface so as to cause vaporization of the film due to absorption of the beam in the film, thereby facilitating removal of the particle from the surface.

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