4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Yong Ku Baek

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Metal organic chemical vapor deposition apparatus and deposition

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Patent

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Metal organic chemical vapor deposition apparatus and...

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Method for forming ferroelectric thin film and apparatus therefo

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Thin film deposition apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Profile ID: LFUS-PAI-P-1681131

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