4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Yoichi Otani

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Collarless trench DRAM device

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Deep trench capacitor through SOI substrate and methods of...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Memory cell configuration and corresponding fabrication method

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Memory cell configuration and corresponding production process

Active solid-state devices (e.g. – transistors – solid-state diode – Gate arrays – Having specific type of active device
Reexamination Certificate

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Method of fabricating high-density, trench-based...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Profile ID: LFUS-PAI-P-2063796

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