4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Ying-Lung Wang

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Bypass gas feed system and method to improve reactant gas...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Carbon and halogen doped silicate glass dielectric layer and...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method to neutralize charge imbalance following a wafer...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Nitride barrier layer to prevent metal (Cu) leakage issue in...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2711056

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