4. Coating apparatus
  5. With indicating, testing, inspecting, or measuring means

Yi-Chiau Huang

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Atomic layer deposition processes for non-volatile memory...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Atomic layer deposition processes for non-volatile memory...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Chamber components with increased pyrometry visibility

Coating apparatus – With indicating – testing – inspecting – or measuring means
Reexamination Certificate

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Low temperature ALD SiO 2

Coating processes – Coating by vapor – gas – or smoke
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Method for monitoring and calibrating temperature in...

Thermal measuring and testing – Thermal calibration system
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Profile ID: LFUS-PAI-P-2227751

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