Thermal measuring and testing – Thermal calibration system
Reexamination Certificate
2007-07-10
2009-08-11
Allen, Andre J (Department: 2855)
Thermal measuring and testing
Thermal calibration system
C374S002000
Reexamination Certificate
active
07572052
ABSTRACT:
The present invention provides a non-destructive method for monitoring and calibrating chamber temperature. One embodiment of the present invention provides a method for measuring temperature comprising forming a target film on a test substrate at a first temperature, wherein the target film has one or more properties responsive to thermal exposure, exposing the target film to an environment at a second temperature in a range higher than the first temperature, measuring the one or more properties of the target film after exposing the target film to the environment at the second temperature, and determining the second temperature according to the measured one or more properties.
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Huang Yi-Chiau
Mahajani Maitreyee
Ravi Jallepally
Allen Andre J
Applied Materials Inc.
Patterson & Sheridan LLP
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