4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With target means

Yasuhiro Yamakage

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Apparatus for focusing an ion beam

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Film inspecting apparatus

Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Patent

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Focused ion beam etching apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-1045208

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