Film inspecting apparatus

Details Film inspecting apparatus Film inspecting apparatus

1999-01-20

2000-10-24

Ben, Loha

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

25055941, 25055939, 356237, 3562372, 356335, 356376, 356394, G01N 2186

Patent

active

061371157

ABSTRACT:
A film inspecting apparatus is used for inspecting fine roughness and particle state on a surface of a thin film. In inspecting the thin film surface, shape data of the thin film are obtained by a scanning type probe microscope. The obtained shape data are analyzed to identify individual particles, and the fine roughness and particle state on the thin film surface are inspected based on the particle data obtained by the shape data analysis. The film inspecting apparatus includes a particle analyzing device for inspecting the fine roughness and particle state on the thin film surface by using the shape data obtained by the scanning type probe microscope. The particle analyzing device includes a particle extracting device for extracting the particles on the film surface from the shape data, and a particle data calculating device for calculating the particle data based on the data extracted by the particle extracting device.

REFERENCES:
patent: 5572320 (1996-11-01), Reintjes et al.
patent: 5923430 (1999-07-01), Worster et al.
patent: 5963314 (1999-10-01), Worster et al.

Affiliated with

Also associated with

Rating

Film inspecting apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Film inspecting apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Film inspecting apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1966232