Apparatus for focusing an ion beam

Details Apparatus for focusing an ion beam Apparatus for focusing an ion beam

1993-11-19

1995-02-28

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

With target means

250309, 2504921, H01J 37317, H01J 3726

Patent

active

053939859

ABSTRACT:
A focused ion beam apparatus which includes an ion source, an extraction electrode for extracting ion beams from the ion source, a condenser lens for focusing the ion beam, a mass spectrometer for separating a desired ion species from the extracted ion beams, a target stage adapted to support a target, deflection electrodes for deflecting the ion beam taken from the mass spectrometer, and guiding same to the target on the stage, wherein the condenser lens group includes an objective lens located immediately before the target stage, and including a decelerating field circuit for forming a decelerating field between the target stage and the outermost electrode of the objective lens, the deflection electrode having a two-stage structure consisting of a first and second group of deflection electrodes in the advancing direction of ion beam, wherein the ion beam deflected by the deflection electrodes is caused to pass through the center of the objective lens irrespective of the amount of beam deflection.

REFERENCES:
patent: 4924104 (1990-05-01), Stengl et al.
patent: 5196706 (1993-03-01), Keller et al.

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