4. Electricity: measuring and testing
  5. Using ionization effects
  6. For analysis of gas, vapor, or particles of matter

Yasuhiro Nishimori

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Impedance matching device provided with reactance-impedance...

Electricity: measuring and testing – Impedance – admittance or other quantities representative of...
Reexamination Certificate

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Plasma monitoring apparatus

Electricity: measuring and testing – Using ionization effects – For analysis of gas – vapor – or particles of matter
Reexamination Certificate

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Plasma processing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Plasma processing method

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Specimen surface processing method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-2028131

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