Electricity: measuring and testing – Impedance – admittance or other quantities representative of...
Reexamination Certificate
2005-09-20
2005-09-20
Nguyen, Vincent Q. (Department: 2858)
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
C333S017300
Reexamination Certificate
active
06946847
ABSTRACT:
An impedance matching device is provided, for which the electric characteristics at an output terminal are accurately analyzed. The matching device is provided with an input detector for detecting RF voltage and current at the input terminal, and an output detector for detecting RF voltage outputted from the output terminal. The matching device also includes a controller for achieving impedance matching between a high frequency power source connected to the input terminal and a load connected to the output terminal. The impedance matching is performed by adjusting variable capacitors based on the detection data supplied from the input detector. When the impedance of the power source is matched to that of the load, the controller calculates the output impedance, RF voltage and RF current at the output terminal, based on the adjusted capacitances of the capacitors, a pre-obtained reactance-impedance data and the detection data supplied from the output detector.
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Ishida Yuji
Itadani Koji
Mito Masakatsu
Nishimori Yasuhiro
Omae Shuji
Daihen Corporation
Hamre Schumann Mueller & Larson P.C.
Nguyen Hoai-An D.
Nguyen Vincent Q.
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