4. Abrading
  5. Flexible-member tool, per se
  6. Interrupted or composite work face

Yaojian Leng

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Chemical mechanical polishing pad having improved groove...

Abrading – Flexible-member tool – per se – Interrupted or composite work face
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CMP in-situ conditioning with pad and retaining ring clean

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Corrosion resistance for copper interconnects

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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In-situ randomization and recording of wafer processing...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
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In-situ randomization and recording of wafer processing...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2284168

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