Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate
2005-03-01
2005-03-01
Tran, Khoi H. (Department: 3651)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
C414S801000, C414S806000, C414S937000
Reexamination Certificate
active
06862495
ABSTRACT:
Wafer order is randomized in-situ by use of a separate wafer staging area and randomly shuffling wafers to and from this staging area to shuffle the processing order of the wafer lot. Positional data is captured for each wafer at both the send and receive ends of the process.
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Guldi Richard L.
Kahn Randolph W.
Leng Yaojian
Leonard Edward J.
Vickers Kenneth G.
Brady III W. James
Garner Jacqueline J.
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
Tran Khoi H.
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