4. Dispensing
  5. Processes of dispensing

Yao-Hwan Kao

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Adjustable exhaust flow for thermal uniformity

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Controlled multi-nozzle liquid dispensing system

Dispensing – Processes of dispensing
Patent

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Distribution manifold for exhausting photoresist vapors

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Spin-coater with self-cleaning cup and method of using

Coating apparatus – With means to centrifuge work
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1508619

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