Controlled multi-nozzle liquid dispensing system

Details Controlled multi-nozzle liquid dispensing system Controlled multi-nozzle liquid dispensing system

1997-04-07

1999-01-12

Derakshani, Philippe

Dispensing

Processes of dispensing

222330, 222399, G01F 1100

Patent

active

058575901

ABSTRACT:
A flow system that is suitable for controlled dispensing of liquids such as anti-reflection coatings is described. The system is driven by a gas at high pressure from a single dispensing bottle. On emerging from the dispensing bottle the fluid is directed into one of two branches, each such branch being terminated by its own nozzle. By inserting a needle valve in each branch of the flow system, between the branch point and the nozzle, control of the amount of liquid dispensed by each nozzle is separately achieved and a change in flow through one nozzle does not affect the flow through the other nozzle.

REFERENCES:
patent: 5148945 (1992-09-01), Geatz
patent: 5150822 (1992-09-01), Eitner, Jr. et al.
patent: 5330072 (1994-07-01), Ferri, Jr. et al.
patent: 5568882 (1996-10-01), Takacs

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